Distance, profile, thickness and 3D measurement sensor for transparent, specular and reflective surfaces.
The
NanoConoprobe is a non contact measurement
point sensor for glass, transparent
materials, wet coating surfaces, liquids
and specular (mirror-like) surfaces.
The NanoConoprobe measurements reach
a depth resolutions in the nanometer
scale and lateral resolution below 1µm,
all in high speed motion.
The NanoConoprobe is insensitive to fast motion and can measure during high speed motion of up to 300mm/sec, without any need for averaging. The NanoConoprobe is a robust product designed for industrial environments and the production floor. The NanoConoprobe features:
Distance, 2-D profile and 3-D measurement of reflective surfaces, including glass, liquids, mirrors and other specular surfaces.
Thickness of glass or transparent coating by simultaneous measurement of the reflection of both the top and the bottom surfaces.
Simultaneous measurement of coating thickness and profiling of both reflective (glass and wet coating) and diffusive (dry coating) surfaces.
True measurement rate of 3000Hz.
High precision and repeatability.
Down to 10µm layer thickness (profile) measurement with high accuracy.
Small spot size down to 1µm.
Position Synchronizer (OPS) with the system encoders or motion commands (up to 3 axis system).
Flexible working range and standoffs with objective lens replacement.
Optional integration with periscopes, telescopes, video camera and other relay optics enabled by the collinear principle of Optimet's technology.
The sensor is provided with an OEM software dll, hardware emulator and manual, for easy and efficient integration and usage. The sensor has a hub - capability to manage in parallel multiple sensors from a single host computer. This advanced feature includes automatic IP recognition, allocation and multiple data stream management software.
Profile and thickness measurement with the NanoConoprobe mounted on a transversal arm:
Inspection of Dry Glass - comparison with competing technology
Glass (50mm/sec), Wet (50mm/sec ~ 300mm/sec)
Optimet
Competing technology
Simultaneous thickness measurement of a 18.3µm transparent layer
The NanoConoprobe's main application is quality control and in-process control. The NanoConoprobe provides real time information on surface profiles and deviations, coating thicknesses on a coating machine, glass thickness (down to 10µm layers) and height measurements of specular surfaces.
Examples for use of the NanoConoprobe for quality control and in-process inspection:
Optical Lens Measurement
Production of complicated aspheric and diffractive optics is highly affected by the ability to measure the surface shape of the lens. The surface shape of the lens cannot be tested with simple metrology methods.
Optimet's NanoConoprobe provides a unique new tool for on line inspection of lens parameters during the production process saving much time and money.
Multi Sensor wet &dry surface inspection
During the coating process of flat panel displays, a series of NanoConoprobe sensors are assembled and aligned in parallel along a transversal arm to measure at high speed and without distortion the thickness of wet and dry layers, enabling monitoring the process while the panels are still wet.
Thickness measurement of 15µm layers in very high resolution
A transversal arm with several NanoConoprobes mounted onto it moves across a flat glass panel. The thickness of the glass is inspected in realtime by simultaneously reading the thickness of the upper and lower layers of the glass at fast moving speed.
Liquid height Measurement in containers and tubes
Filling levels of liquid containers are sometimes difficult to control.
Due to its collinear design, the NanoConoprobe sensor can penetrates inside deep holes and tubes to control the liquid level inside the container and compare it with the container rim.
OBJECTIVE
LENSES
16mm lens for NanoConoprobe
For flatness inspection of dry and wet surfaces P/N 3Z79016
25mm Gold lens for NanoConoprobe
Widely use in PDP surface coatings inspection P/N 3Z79030
40mm lens for NanoConoprobe
For glass in-process thickness inspection P/N 3Z79040
50T lens for NanoConoprobe
For glass in-process thickness inspection P/N 3Z79050
75mm lens for NanoConoprobe
For glass in-process thickness inspection P/N 3Z79075
The CD Setup includes a complete package of the files required to operate the NanoConoProbe. The SDK provides code samples in addition to utilities that test the communication between the sensor and the PC.
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