NANOConoProbe
A sensor for glass, mirror and wet surface 3-D measurements



Jerusalem, Israel, September 2007

Optimet introduces the NanoConoprobe – for unprecedented profile, 3-D and thickness measurement of glass, transparent materials, wet surfaces and mirror surfaces in the same set-up with resolution of up to several nanometers. Among the objects and substrates that the NanoConoprobe is capable of measuring are:

  • Glass.
  • Transparent materials.
  • Wet surfaces.
  • Mirrors or mirror like (specular) surfaces.
  • Gage blocks (such as Johansson gage blocks).
  • Highly polished surfaces such as polished silicon.
  • Transparent coatings.
  • Machined metal semi diffusive surfaces.

The NanoConoprobe capabilities include:

  • Profile and 3-D surface measurements of glass, transparent and mirror surfaces.
  • Excellent Resolution from microns up to several nanometers (pending on the objective lens used) with extremely high lateral resolution of up to 1 micron.
  • Thickness measurements option of glass and transparent coatings such as photo resist coating on glass substrate. The thickness is measured by simultaneously measuring both surfaces with the same sensor.
  • Vibration amplitude and frequency.
  • Flexible working ranges with 16mm-75mm lens objectives or microscope lens objectives up to X20.
  • Measurement on machined metal semi diffusive surfaces covering incident angles of up to 45 degrees, utilizing up to one third of the lens working range.
  • True Measurement rate of 3000Hz and up to 15000Hz in the Pro version.
  • Video camera accessory working coaxially with the measurement axes - optional.
  • Capability to work with periscopes, telescopes, and other relay optics due to the basic collinear principle of the sensor technology.
  • Ethernet interface.
  • Full Compatibility with Conoprobe Mark 3 Mechanical interface, operating software and communication.

Based on Optimet unique and patented Conoscopic Holography technology, the NanoConoprobe is an important addition to Optimet solutions and products enabling the user to cover a wide range of measurement and metrology solutions for all object types.

About Optimet
Optimet (Optical Metrology Ltd.), a member of Ophir Optronics group, is a provider of sophisticated Non-Contact measurement sensors and solutions, with up to sub-micron precision, for distance, 2-D & 3-D measurements. Optimet implements practical application of its unique and patented conoscopic holography technology. Established in 1995, Optimet is a member of the Ophir Optronics group, a world leader in Laser Measurement Instruments, Optical Infra-Red components and lens-assemblies. Sold worldwide, Optimet products offer measurement solutions for a wide range of markets, among which are the Automotive, Aerospace, Dental CAD/CAM, Steel and Micro-Electronics. Optimet solutions and sensors are used for in-process inspection, quality control and reverse engineering applications.
Optimet is ISO9000-2001 certified.

   
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