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The MicroConoProbe
depth measurement device, based on proprietary conoscopic
holography, is the only one of its kind to offer 3D*
through-the-microscope measurement for standard microscopes.
The MicroConoProbe is designed for quality assurance
and process control of microstructures in the semiconductor
and micro-mechanics fields.
The MicroConoProbe
operates either when mounted on a standard microscope
or when fitted with the microscope barrel & lenses.
The MicroConoProbe
evolved out of the field–proven ConoProbe, used
successfully by leading automotive, aerospace, medical
and precision equipment manufacturers. The need for
high-cost stabilization equipment is avoided since measurements
performed on both static and moving objects yield data
of equally high quality.
The MicroConoProbe
provides the industry with 3D* non-contact through-the-
microscope measurement that makes microstructure inspection
easier than ever.
As the only device
of its kind currently available in this market it offers:
- Measurement of reflective and transparent
objects.
- Ultra high-resolution measurement
(up to 8 nm).
- Data-Quality-Index (SNR) for utmost
measurement confidence.
- Single-mouse-click extraction of
geometrical features such as radii, center point,
angle and displacement.
- Connectivity to any infinite conjugate
microscope with C-mount interface.
- A stand-alone version with through-the-microscope
barrel assemblies for a video-camera.
- See-through optics are provided
for attachment of a camera or other optical equipment.
When integrated into metrology systems,
the MicroConoProbe uses mathematical processing to transform
the reflected laser beam into a 2D profile or 3D surface.
It easily processes an impressive variety of working
ranges when using interchangeable lenses.
* In order to obtain 2D/3D measurements,
the single point measurement device (MicroConoProbe)
must be integrated with a scanner system.
EC1000
The EC1000 Controller Unit communicates
with the MicroConoProbe and the host PC. It also has
an encoder input for triggering measurements. DSP technology
controls the measurements and an advanced micro-controller
handles all communications.
The MicroConoProbe emits a laser beam
that is reflected by a beam splitter and hits the object
being measured. Reflected light returns from the object
through the beam splitter and birefringent crystal,
then is detected by the sensor’s CCD camera (refer
to Figure C 1).
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Figure C 1 Paths
of Light Inside the MicroConoProbe
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The birefringent crystal modifies the
speed of each light ray differently in accordance with
its angle. This creates a high contrast fringe pattern
on the CCD camera. The angle of the light ray is a function
of the distance between the reference plane and the
laser spot projected on the object. The distance, therefore,
can be determined by analyzing the characteristics of
the created pattern.
The EC1000 Controller Unit analyzes
this pattern and calculates the object’s distance.
The exact relationship between the signal on the CCD
camera and the object's distance is determined by a
careful and accurate calibration process performed for
each objective lens used.
Last Update:
October 25, 2007
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