The NanoConoprobe sensor provides unprecedented profile, 3-D and thickness measurement of glass, transparent materials, wet surfaces and mirror surfaces in the same set-up, with resolution of up to several nanometers. Among the objects and substrates that the NanoConoprobe is capable of measuring are:

• Glass.
• Transparent materials.
• Wet surfaces.
• Mirrors or mirror like (specular) surfaces.
• Gage blocks (such as Johansson gage blocks).
• Highly polished surfaces such as polished silicon.
• Transparent coatings.
• Machined metal semi diffusive surfaces.

The NanoConoprobe capabilities include:

• Profile and 3-D surface measurements of glass, transparent and mirror surfaces.
• Excellent Resolution from microns up to several nanometers (depending on the objective lens used) with extremely high lateral resolution of up to 1 micron.
• Thickness measurement options of glass and transparent coatings such as photo resist coating on glass substrate. The thickness is measured by simultaneously measuring both surfaces with the same sensor.
• Vibration amplitude and frequency.
• Flexible working ranges with 16mm-75mm lens objectives or microscope lens objectives up to X20.
• Measurement on machined metal semi diffusive surfaces covering incident angles of up to 45 degrees, utilizing up to one third of the lens working range.
• True Measurement rate of 3000Hz and up to 15000Hz in the Pro version.
• Video camera accessory working coaxially with the measurement axes - optional.
• Capability to work with periscopes, telescopes, and other relay optics due to the basic collinear principle of the sensor technology.
• Ethernet interface.
• Full Compatibility with Conoprobe Mark 3 Mechanical interface, operating software and communication.

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Last Update: October 25, 2007      Site Map